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利用低压化学气相沉积技术,以BCl_3-C_3H_6-H_2为反应气体制备了不同掺硼量的热解碳薄膜B_xC_(1–x)(x=0.05,0.10,0.16,0.30,0.50),并研究了硼含量对BxC1–x微观结构及力学性能的影响。B0.1C0.9展现了高度结晶的类石墨结构,其中大部分B取代石墨层中的C。随着B含量上升,B主要形成B–C键,B_xC_(1–x)结构向无定型转变。纳米压痕测试结果显示,B0.1C0.9的弹性模量和硬度较低,载荷位移曲线显示其力学变形接近弹性变形,随着B含量增加,碳化硼生成量增加,其弹性模量和硬度显著提升,载荷位移曲线表现出典型的脆性材料力学行为。
The B_xC_ (1-x) (x = 0.05,0.10,0.16,0.30,0.50) boron-doped pyrolytic carbon thin films were prepared by the low-pressure chemical vapor deposition technique using BCl_3-C_3H_6- Effect of Boron Content on Microstructure and Mechanical Properties of BxC1-x. B0.1C0.9 showed a highly crystalline graphite-like structure, most of which replaced C in the graphite layer. With the increase of B content, B mainly formed B-C bonds, and the B_xC_ (1-x) structure changed to amorphous. The result of nanoindentation test shows that the elastic modulus and hardness of B0.1C0.9 are lower, and the load displacement curve shows that the mechanical deformation is close to elastic deformation. With the increase of B content, the amount of boron carbide increases, and the elastic modulus and hardness Significantly improved, the load-displacement curve shows the typical brittle material mechanical behavior.