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利用扫描电镜进行能谱定量分析时,可使用有标样法和无标样法。这两种方法的准确度不同,前者较高,后者稍低。在我国,能谱定量分析时普遍采用无标样法。这种方法使用无标样定量程序,它是从理论上计算出X射线的强度因子代替纯元素,其特点是无需标样,快速简便,但准确度低。该方法在国际上应用并不太广泛。为了查明无标样法的准确度究竟多少?它与实验条件及被测元素原子序数和含量的关系如何?需要筹集足够数量的标样。提出了一种能谱分析条件下测定标样均匀度和稳定度的方法。通过与同一标样在常规条件下的波谱分
The use of scanning electron microscopy quantitative analysis, the standard sample method can be used and no standard method. The accuracy of these two methods is different, the former is higher, the latter is slightly lower. In our country, there is no standard method for quantitative analysis of energy spectrum. This method uses a standard sample-free quantification procedure that theoretically calculates the intensity factor of X-rays instead of pure elements and is characterized by the absence of a standard sample, quick and easy, but low accuracy. This method is not widely used in the world. In order to ascertain the accuracy of the standard sample method, how much is it related to the experimental conditions and the atomic number and content of the tested element, it is necessary to raise a sufficient number of standard samples. A method for the determination of standard evenness and stability under the condition of energy spectrum analysis is proposed. Pass the same standard under the normal conditions of the spectral points