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报道一个 Ｍ Ｏ Ｃ Ｖ Ｄ 全方位综合工艺模拟系统． 该系统包含反应室气流流体力学模拟、化学反应热力学模拟和沉积过程动力学模拟等 ３ 个子系统， 它们可以独立运行， 也可以联合运行．
A M O C V D omni-directional integrated process simulation system is reported. The system consists of three subsystems: fluid dynamics simulation of reaction chamber, thermodynamic simulation of chemical reaction and dynamics simulation of deposition process, which can operate independently or jointly.