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用电子回旋共振等离子体(ECR)系统,在气压、衬底温度以及微波功率等外界条件不变的情况下,仅改变甲烷浓度制备金刚石薄膜,利用傅里叶红外吸收光谱仪(FTIR)对甲烷浓度为6%的ECR系统进行实时监测,分析研究了不同沉积时间条件下,甲烷和氢气产生的等离子体对薄膜早期成核、生长过程以及衬底的影响,并结合Raman光谱X射线衍射(XRD)和扫描电镜(SEM)对金刚石薄膜进行了分析。
The electron cyclotron resonance plasma (ECR) system was used to prepare diamond thin films by changing the concentration of methane only under the conditions of atmospheric pressure, substrate temperature and microwave power. The concentration of methane was measured by Fourier transform infrared spectroscopy (FTIR) The effect of plasma generated by methane and hydrogen on the nucleation and growth process and substrate during the early deposition of 6% ECR system was studied. The Raman spectra of the samples were analyzed by X-ray diffraction (XRD) And scanning electron microscopy (SEM) diamond films were analyzed.