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本文分析了光电式传感器在模拟式工作状态下难于实现高精度测量的原因,提出了通过自校正提高测量精度的方法。通过卷绕式连续真空镀膜膜厚测量的实例,证明效果良好。
This paper analyzes the reasons that photoelectric sensors are difficult to realize high-precision measurement under analog working condition, and proposes a method to improve the measurement accuracy by self-tuning. By winding continuous vacuum coating film thickness measurement example, the effect proved good.