论文部分内容阅读
覆着气敏层的叉指式电容适于用微电子技术使气体传感器集成化,它们能通过安装在加热膜上而使其温度稳定,但通常都面临着通过该加热膜对大面积传感器的有效温度梯度的问题。介绍了在加热膜上能保证近乎均匀温度分布的加热器配置,用于估计方形膜加热功耗的分析方法和有限元模拟法。试验芯片已被设计和制造,其制作过程完全符合于标准的两极工艺。
The interdigital sensing interdigital capacitors are suitable for integration of gas sensors with microelectronic technology. They can be temperature stabilized by mounting on a heating film, but are often faced with the problem of over-heating the large area sensor Effective temperature gradient problem. The heater configuration, which can guarantee a nearly uniform temperature distribution on the heating film, the analysis method and the finite element simulation method for estimating the heating power of the square film are introduced. Test chips have been designed and manufactured, and their production process is fully in line with the standard bipolar process.