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依据光学薄膜理论及光学材料的特性,结合膜系设计软件,采用拆分技术原理,实现了双面膜系的设计,解决了单面膜层过厚、应力过大的问题。利用逆向分析法对实验测试结果进行反演,通过对膜层敏感度分布的研究,分析了产生误差的原因。采用不同的监控方式,使膜系的敏感层厚度得以精准控制。最终研制的滤光膜光谱测试结果表明,3.31μm单点透射率为93.7%,通带半峰全宽为49nm,1~3.2μm和3.4~5μm波段平均透射率为0.17%,满足系统使用要求。
According to the theory of optical thin film and the characteristics of optical materials, combined with the design software of film system, the principle of split technology is adopted to realize the design of double-sided film system and solve the problem of over-thick single-layer film and excessive stress. The reverse analysis method is used to invert the experimental test results. By analyzing the distribution of film sensitivity, the reason of the error is analyzed. Using different monitoring methods, the thickness of the sensitive layer of the film system can be precisely controlled. The results of spectral test of the filter finally showed that the single-point transmittance of 3.31μm was 93.7%, the full width at half-maximum of the passband was 49nm, the average transmittance of the wavelength band of 1 ~ 3.2μm and 3.4 ~ 5μm was 0.17% .