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针对驱动合力偏离运动部件质心时,精密气浮运动平台运动部件会产生偏转振动,会带来运动和定位的动态误差,提出一种基于动力学分析的动态偏转误差评估方法.运用牛顿-欧拉法并引入欧拉四元数建立系统动力学方程,利用实验数据对静压气体轴承受力进行插值处理,有效解决了静压气体轴承受力非线性的问题,得到了更为精确的偏转误差曲线.以H形双边驱动XY运动平台为研究重点,分析其在不同受力情况下的偏转误差,结果表明:驱动不同步会引起运动平台较大幅度的偏转.该方法还可以推广到其他结构模型的运动平台.
Aiming at the deviation of the driving force from the center of mass of the moving parts, the moving parts of the precision air-floating platform will generate deflection vibration, which will bring about the dynamic error of the movement and positioning. A dynamic deflection error assessment method based on dynamic analysis is proposed. Method and introduce the Euler quaternion to establish the system dynamics equation. The experimental data is used to interpolate the bearing force of the static pressure gas bearing, which effectively solves the problem of the nonlinear force of the static pressure gas bearing, and obtains the more accurate deflection error Curve.With the H-shaped double-driven XY motion platform as the research focus, the deflection error of the XY motion platform under different forces is analyzed.The results show that the unsynchronized driving can cause a large deflection of the motion platform.This method can also be extended to other structures Model of the platform.