Extraction Characterstics of Radio Frequency ICP Ion Source

• 作 者: 许沭华 任兆杏 等
• 机 构: InstuteofplasmaPhysics
• 出 处: 等离子体科学和技术：英文版
• 发表日期: 2002年4期
• 关键词: 离子源 半导体蚀刻 射频提取特征 感应耦合等离子体 radio frequency inductively coupled plasma ion sourc
• 基金项目: This work was supported by National Natural Foundation of China No.19835030.

An inductively coupled radio frequency ion source has been developed and its extraction characteristics measured.Beam current density up to 0.11mA/cm^2 was obtained with argon at a rf discharge power of about 140W.The dependences of ion beam on the discha