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This paper uses finite element method to obtain the three-dimensional temperature field of laser-induced transient thermal grating (TTG) for two-layered structure of diamond film on ZnSe substrate.The numerical results indicate that unique two-times heating process is gradually experienced in the area between two adjacent grating stripes.However,there is a little change for the temperature field along the depth direction for the diamond film due to its great thermal conductivity.It further finds that the thickness of the diamond film has a significant influence on the temperature field in diamond/ZnSe system.The results are useful for the application of laser-induced TTG technique in film/substrate system.