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用N_2激光337.1nm谱线辐照,能有效地引发顺酐型和环氧型不饱和聚酯树脂组成的光致抗蚀剂的固化反应。用付立叶交换红外光谱法跟踪反应动力学过程,并用溶解试验检验固化效果。讨论了反应转化率,反应速率与引发剂浓度的关系。
Irradiation with 337.1 nm N 2 laser can effectively initiate the curing reaction of the photo-resist composed of maleic anhydride and epoxy unsaturated polyester resin. The kinetics of the reaction were followed by Fourier transform infrared spectroscopy and the effect of curing was tested by dissolution test. The relationship between reaction conversion rate, reaction rate and initiator concentration was discussed.