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作为夺取高技术优势的一个“桥头堡”,许多国家都十分重视发展新型高效半导体生产技术,这方面的投资不断增加,科研活动日趋活跃。美国桑迪国家实验室1987年3月已建成世界上第一条由工业机器人组成的半导体晶片生产线,于1988年年底投入使用。该生产线的主要设备是机器人自动导向车,由电脑控制,穿梭于22间单独封闭的工作室,自动完成全部生产工序,初期可月产400块6吋晶片。美国斯坦福科学研究所最近发明了一种激光束平板印刷制造芯片的新技术。可直接、快速地在芯片上刻出大规模集成电路,十分适合大批量生产。
As a “bridgehead” to seize the advantages of high technology, many countries attach great importance to the development of new and efficient semiconductor production technologies. Investments in this field are constantly increasing and research activities are becoming increasingly active. Sandy National Laboratory in the United States in March 1987 has built the world’s first industrial robot composed of semiconductor wafer production line, put into operation in late 1988. The main equipment of the production line is the robot’s automatic guided vehicle, which is controlled by a computer. The shuttle runs through 22 individually-enclosed studios and automatically completes all the production processes. It can initially produce 400 6-inch wafers per month. Stanford Institute of Science recently invented a new technology for laser beam lithography chip manufacturing. Can be directly and quickly engraved on the chip large scale integrated circuits, is very suitable for mass production.