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A series of CrAlN coatings with different Al content were synthesized on high-speed steel(M2)substrate by reactive direct current(DC)magnetron sputtering.The influences of Al content on the microstructure and mechanical property of CrAlN coatings were studied by scanning electron microscopy(SEM),X-ray diffraction(XRD),energy dispersive spectrum(EDS)and nano-indentation techniques,respectively.The results indicate that the coatings exhibit only fcc c-CrN phase when Al content is less than 65 at%,and fcc c-CrN and c-AlN phases when Al content is 78 at%.The coating with Al content of 60 at%exhibits high hardness and elastic modulus.The maximum hardness and elastic modulus values could reach 36.8 GPa and 459.5 GPa,respectively.
A series of CrAlN coatings with different Al content were synthesized on high-speed steel (M2) substrate by reactive direct current (DC) magnetron sputtering. These influences on Al content on the microstructure and mechanical property of CrAlN coatings were studied by scanning electron microscopy (SEM), X-ray diffraction (XRD), energy dispersive spectrum (EDS) and nano-indentation techniques, respectively. These results indicate that the coatings exhibit only fcc c-CrN phase when Al content is less than 65 at%, and The coating with Al content of 60 at% exhibits high hardness and elastic modulus. The maximum hardness and elastic modulus values could reach 36.8 GPa and 459.5 GPa, respectively.