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激光化学汽相沉积（ＬＣＶＤ）能在激光波长级区域内实现选择性沉积，再利用高斯光束的特性，可以实现在石英衬底上沉积球形剖面介质膜用作做透镜。其沉积生成形状与沉积速率有关，而沉积速率又与衬底温度及其分布有关。本文通过数学推导与计算机处理，详细描述了激光诱导石英衬底的温度分布，并通过高斯光束光斑扩束方法测量石英衬底表面温度分布。理论与实验相符，从而摸索了改善石英衬底温度分布以实现直接沉积微透镜的要求。
Laser chemical vapor deposition (LCVD) in the wavelength region of the laser to achieve selective deposition, and then use the characteristics of the Gaussian beam can be deposited on the quartz substrate spherical cross-sectional dielectric film used as a lens. The sedimentary formation shape is related to the deposition rate, which in turn is related to the substrate temperature and its distribution. In this paper, the temperature distribution of laser-induced quartz substrate is described in detail by mathematical derivation and computer processing, and the surface temperature distribution of quartz substrate is measured by Gaussian beam spot expanding method. The theory is in good agreement with the experiment, and the requirements for improving the temperature distribution of the quartz substrate to explore the direct deposition of the micro-lens are explored.