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基于光传输理论研究了前表面颗粒污染物诱导薄光学元件产生初始损伤的原因,提出了颗粒遮光效应和颗粒造成的光学元件局部热变形两者共同作用对光束进行扰动的损伤机理.研究结果表明:对于高功率激光光束,薄光学元件局部热变形对光束的扰动是产生较高光强调制的重要原因;随着激光脉冲发射次数的增加,局部热变形的表面形状、位相延迟幅度、热扩散长度不断变化,会在光学元件内不同厚度处和后表面xy方向上的不同位置处产生较高的光强调制,不仅容易引起后表面产生多个损伤点,也可能在光学元件内就产生损伤,并且在厚度方向上的损伤点是分散的.
Based on the optical transmission theory, the reason of the initial damage induced by the particle contaminants on the surface of the thin optical element was studied, and the mechanism of the light beam perturbation was proposed by the opacity of the particle and the local thermal deformation of the optical element caused by the particles. : For high-power laser beams, the local thermal deformation of the thin optical elements is the main reason for the modulation of the light beams due to the local thermal deformation. With the increase of the number of laser pulses, the surface shape, phase retardation, thermal diffusion length Constant changes in the thickness of the optical element and the rear surface of the xy direction at different positions produce a higher intensity modulation, not only easily lead to the rear surface of multiple damage points, it may damage within the optical element, And the damage point in the thickness direction is dispersed.