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本文介绍了一种压电陶瓷微补偿器，其位移输出与输入电压呈线性关系，满量程误差小于0.6%；在频率低于500Ｈz时的动态性能颇为理想；模拟静压轴承的主轴回转误差进行仿真试验，补偿器的输出位移信号与其模拟输入信号，在２０Ｈz(１２００r／ｍｉｎ）下是十分相近的．
This paper introduces a piezoelectric micro-compensator, the displacement of the output voltage is linear with the input voltage, full-scale error of less than 0.6%; at frequencies below 500Hz when the dynamic performance is quite satisfactory; static hydrostatic bearing spindle slew error Simulation test, compensator output displacement signal and its analog input signal, at 20Hz (1200r / min) is very similar.