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研制成一种以微处理器为核心的,分辨力可达0.1微米的光栅测长仪。软、硬件的使用量都相当节省。进行了误差分析,导得模数变换器的位数影响,光电信号直流电平变动误差的关系式。实践结果表明,这种设计方案对制造质量较差的光栅尺,质量较差的光电信号,均有较好的适应能力。并可预计,这种设计思想,对一切能提供两相正余弦信号的位移编码器,如磁栅,同步感应器、激光干涉仪等都是适用的。
Developed into a microprocessor as the core, the resolution of up to 0.1 micron grating length measuring instrument. Soft and hardware usage are quite savings. The error analysis is conducted to find the relationship between the number of bits of the A / D converter and the error of the DC level of the optical signal. The practice results show that this design scheme has good adaptability to the manufacturing of poor quality grating scale and poor quality optical signal. And it is expected that this design idea is applicable to all displacement encoders that can provide two-phase sine and cosine signals, such as magnetic grids, synchronous sensors and laser interferometers.