论文部分内容阅读
利用Nd:YAG纳秒激光(波长为532和355nm)对单晶硅在真空中进行了累积脉冲辐照,研究了表面微结构的演化情况.在激光辐照的初始阶段,532和355nm激光脉冲均在硅表面诱导出了波纹结构,后者辐照硅表面后形成了近似同心但稍显混乱的环形波纹结构.随着脉冲数的增加,波纹结构逐渐演化为一种类似珠形的凹凸结构,最后形成准规则排列的微米量级锥形结构,该微结构的生长依赖于表面张力波和结构自组织.分析发现,形成的交叉环形结构主要是在355nm激光辐照硅的过程中,表面张力波导致波纹结构部分叠加的结果。
Single-crystal silicon was irradiated by Nd: YAG nanosecond laser (532nm and 355nm wavelength) in a vacuum, and the evolution of surface microstructure was studied. In the initial stage of laser irradiation, 532 and 355nm laser pulses Both induced a corrugated structure on the silicon surface, while the latter formed an approximately concentric but slightly disordered ring-shaped corrugated structure after irradiating the silicon surface. As the pulse number increased, the corrugated structure gradually evolved into a bead-like concave-convex structure , And finally formed a quasi-regular order of micron-scale tapered structure, the growth of the microstructure depends on the surface tension wave and structure self-organization.It was found that the formation of the cross-ring structure is mainly in the process of 355nm laser irradiation of silicon, the surface Tension wave results in partial superimposition of the corrugated structure.