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檢測深孔表面粗糙度,迄今國内外尚是一个沒有完全解决的问題,本文敘述一种根据光的反射原理,利用激光、光导纖维及集成电路等技术研制的“光纤、激光深孔表面粗糙度檢测仪”。对孔径为φ3毫米以上的小孔,可測量的最大深度为200毫米,对孔径大于φ100毫术的孔,可测量的最大深度可达10米。本仪器既可测量內表面也可测量外表面;既可作静态测量,也可作动态测量。经陕西省计量测试研究所檢定,國家计量研究院复测,本仪器相对不稳定度为±3％,分辨率为0.02μm。
Testing deep-hole surface roughness has not been completely solved so far in China and abroad. In this paper, an optical fiber based on the reflection principle of light, laser, optical fiber and integrated circuit technology, Degree detector. " For holes with a diameter of 3 mm or more, the maximum measurable depth is 200 mm. For holes larger than 100 mm, the maximum measurable depth can be up to 10 m. The instrument can measure the inner surface can also measure the outer surface; both for static measurement, but also for dynamic measurement. Measured by Shaanxi Institute of Metrology, National Institute of Metrology retest, the relative instability of the instrument ± 3%, a resolution of 0.02μm.