论文部分内容阅读
用不同能量密度的飞秒激光在不同辅助气压下对TiC陶瓷进行微孔加工,采用扫描电子显微镜(SEM)、微米X射线三维成像仪(Micro-CT)和X射线光电子能谱(XPS)对微孔的形貌和化学键进行了研究。结果表明,在不同能量密度下,微孔入口圆度均不小于99%,微孔出口圆度随能量密度的增加而增大,随后趋于稳定,最大出口圆度为95%。微孔锥度随辅助气压增大而增大,当能量密度为0.51J/mm2、辅助气压为0.3MPa时,微孔锥度最佳,其长轴锥度为-0.13°,短轴锥度为0.77°。激光加工过程中,C-C键、Ti-C键断裂,在微孔附近形成包含金属Ti、Ti2O3和TiO2等物质的残渣。最后对激光与材料的作用机制进行了探讨。
The TiC ceramics were micro-machined with femtosecond laser with different energy density under different auxiliary pressures. The microstructure of TiC ceramics was characterized by scanning electron microscopy (SEM), micro-CT and XPS (X-ray photoelectron spectroscopy) Micropore morphology and chemical bonds were studied. The results show that under different energy densities, the circularity of micropore inlet is not less than 99%. The circularity of micropore outlet increases with the increase of energy density, and then tends to be stable. The maximum circularity of outlet is 95%. The micropore taper increases with the increase of assist pressure. When the energy density is 0.51J / mm2 and the assist pressure is 0.3MPa, the micropore taper is the best. The long axis taper is -0.13 ° and the short axis taper is 0.77 °. During the laser processing, the C-C bond and the Ti-C bond are broken, and a residue containing substances such as metal Ti, Ti2O3 and TiO2 is formed near the micropores. Finally, the mechanism of action of laser and material is discussed.