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稳定性是评估抛光液性能的重要指标之一,其关系到抛光液的寿命及能否产业化。从多羟多胺络合剂的反应原理出发,先对强碱性和弱碱性络合剂组成的抛光液进行对比。考量铜去除速率和抛光液的pH值,由这两方面随抛光液放置时间的变化规律对弱碱性多羟多胺组成的抛光液进行评估。实验结果表明,加入氧化剂后,强碱性络合剂配制的抛光液必须现配现用,否则铜去除速率和抛光液的pH值会快速下降;而弱碱性络合剂配制的抛光液在使用过程中放置时间可延长至8 h,且铜去除速率和抛光液的pH值稳定。
Stability is one of the important indicators to evaluate the performance of polishing solution, which is related to the life of the polishing solution and whether it can be industrialized. Starting from the reaction principle of polyhydroxy polyamine complexing agent, the polishing solution composed of strong and weak basic complexing agents is compared firstly. Considering the removal rate of copper and the pH value of the polishing solution, the polishing solution consisting of the weakly basic polyhydroxy polyamines was evaluated from the variation of the polishing solution placement time in these two aspects. The experimental results show that after the oxidant is added, the slurry prepared by strong alkaline complexing agent must be ready for use, otherwise, the removal rate of copper and the pH value of slurry will decrease rapidly. However, the weakly alkaline complexing agent The use of the process to place the time can be extended to 8 h, and the copper removal rate and the pH of the polishing solution stable.