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本文以典型器件为例,较详细地介绍了Si-PIN光电二极管和Si雪崩光电二极管,讨论了器件理论和器件结构、制作工艺等一些实际问题。介绍了典型器件参数。
In this paper, a typical device is taken as an example. The Si-PIN photodiode and Si avalanche photodiode are introduced in detail. Some practical problems, such as device theory, device structure and fabrication process are discussed. Describes typical device parameters.