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随着微米／纳米科学技术的发展，微细加工微区分析所用的主要技术之一──聚焦离子束技术引人注目．本文简述了具有液态金属离子源的聚焦离子束技术的主要功能，着重报道了近年来该技术在下述领域中的应用：（1）半导体大规模集成电路器件的集成、失误诊断和修复．（2）光电子集成技术中量子阱激光器和光纤相位掩模的制备及量子效应研究．（3）超导器件和真空微电子器件的研制．（4）二次离子质谱分析和透射电子显微镜样品的制备．
With the development of micron / nanometer science and technology, one of the main technologies used in micro-area micro-analysis of microfabrication ─ Focus ion beam technology attracts attention. In this paper, the main functions of focused ion beam technology with liquid metal ion source are briefly described. The application of this technology in the following fields is highlighted in recent years: (1) Integration, fault diagnosis and repair of semiconductor large scale integrated circuit devices. (2) Preparation and Quantum Effect of Quantum Well Laser and Optical Phase Mask in Photoelectronic Integrated Technology. (3) Development of superconducting devices and vacuum microelectronic devices. (4) Secondary Ion Mass Spectrometry and Transmission Electron Microscopy Sample Preparation.