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随着电子计算机向大型化,高速化发展,正在逐渐成为它的主要组成部份的半导体集成电路也希望向高集成度,高稳定性的方向努力。在半导体集成电路中,按照器件的结构大体上可分为MOS集成电路和双极集成电路两类,从集成度、经济上看,在中速和低速存储器中MOS集成电路今后将占有重要的位置。然而,在MOS集成电路领域里,最近提出了各种各样的设想,为了提高集成度、特性和稳定性,出现了许多新工艺,新结构,并积极地向商品化方向发展。
As electronic computers have grown in size and speed, semiconductor integrated circuits, which are becoming a major part of them, are also hoping to work toward high levels of integration and stability. In the semiconductor integrated circuit, in accordance with the structure of the device can be roughly divided into MOS integrated circuits and bipolar integrated circuits in two categories, from the integration point of view, in the medium and low speed memory MOS integrated circuits in the future will occupy an important position . However, various proposals have recently been made in the field of MOS integrated circuits, and many new processes and structures have emerged in order to improve integration, characteristics and stability, and commercialization has been actively pursued.