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本文通过探索光谱仪出射光谱线峰位移与温度、波长及系统误差等因素的关系,发现了它们之间的规律性。运用这些规律性,利用传感器及计算机技术,发明了光栅单色仪的智能波长校正装置(IWC),该装置能准确地计算出光栅光谱仪的实时语线峰位移,光栅的驱动装置根据谱线峰位移值修正光栅的旋转,使每条光谱线峰位置准确、顺序地通过先谱仪出射狭缝。智能波长校正装置计算的峰位置与光谱线实时描迹峰位置之差小于0.005nm。将智能波长校正装置应用在扫描式ICP光谱仪上,开发了智能波长校正的扫描式ICP光谱仪,简称扫描式ICP-IWC光谱仪。实验表明,在谱线峰位置上采用定点测量模式,能提高扫描式ICP光谱仪测量谱线峰先强的精密度。扫描式ICP-IWC光谱仪的测量精度约1%,它具有结构简单、无需预热、操作简单、快速、安全可靠等特点。
In this paper, by exploring the relationship between the peak displacement of the spectral line and the temperature, wavelength and system error, we found the regularity between them. Utilizing these regularities and using sensors and computer technology, IWC invented a smart wavelength correction device (IWC) that accurately calculates the real-time speech line peak shift of the grating spectrometer. The displacement value corrects the rotation of the raster so that each spectral line peak is positioned exactly and sequentially through the primary spectrometer exit slit. The difference between the peak position calculated by the smart wavelength correction device and the real-time peak position of the spectral line is less than 0.005 nm. The smart wavelength correction device applied to the scanning ICP spectrometer, the development of intelligent wavelength-corrected scanning ICP spectrometer, referred to as scanning ICP-IWC spectrometer. Experiments show that using the fixed-point measurement mode at the position of the spectral line can improve the precision of the spectral line of the scanning ICP spectrometer. Scanning ICP-IWC spectrometer measurement accuracy of about 1%, it has a simple structure, without preheating, easy to operate, fast, safe and reliable.