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使用磁控溅射结合惰性气体冷凝的方法制备了Cu纳米粒子,通过将Cu纳米粒子沉积与ZnO离子束溅射原位复合的方法制得了CuNPs@ZnO纳米复合薄膜,并研究了退火温度对CuNPs@ZnO纳米粒子复合薄膜的结构和光学性能的影响。通过对样品的表征发现所得产物中存在着低温条件下难以形成的立方相、岩盐结构的ZnO。并且,样品的微观形貌、结晶性和光学性能随着退火温度的变化而发生显著地变化。
Cu nanoparticles were prepared by magnetron sputtering combined with inert gas condensation. CuNPs @ ZnO nanocomposite films were prepared by in-situ Cu nanoparticle deposition and ZnO ion beam sputtering. The effects of annealing temperature on the formation of CuNPs Effect of Structure and Optical Properties of @ZnO Nanoparticle Composite Films. Through the characterization of the samples, it was found that there is a cubic phase and rock salt structure ZnO which is hard to be formed under the low temperature condition. Moreover, the microstructure, crystallinity and optical properties of the samples change significantly with the annealing temperature.