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针对高分子光波导在制造工艺中波导芯厚度难以控制、芯层和包层的折射率差变动时的随机性以及材料各向异性引起的偏振态依赖性等实际问题,提出了采用抗波导芯厚度误差、抗折射率差变动和抗偏振变动的宽带波导耦合器回路结构的解决方案,给出了设计的理论和方法。在实测数据的基础上,进行了带宽为120nm的3dB氟化聚酰亚胺波导耦合器设计。由该器件的三维BPM仿真结果表明,在上述带宽上,波导芯厚度的变动范围为7～8μm、相对折射率差变动范围为0 24%～0.30%,两个正交偏振态都具有(50±2.0)%功率输出比的良好特性。
Aiming at the practical problems such as the randomness of the waveguide core thickness in the manufacturing process, the randomness when the refractive index difference of the core and the cladding fluctuate, and the dependence of the polarization state caused by the material anisotropy, The thickness of the error, anti-refractive index difference changes and anti-polarization broadband waveguide coupler circuit structure solutions, given the design theory and methods. Based on the measured data, a design of 3dB fluorinated polyimide waveguide coupler with a bandwidth of 120nm was carried out. The results of three-dimensional BPM simulation of this device show that the thickness of the waveguide core varies from 7 μm to 8 μm and the relative refractive index difference ranges from 0% to 0.30% over the above bandwidth. The two orthogonal polarization states have the values of (50 ± 2.0)% Good power output ratio.