,Tribological properties of diamond-like carbon films deposited by pulsed laser arc deposition

• 作 者: Zhang Zhen-Yu Lu Xin-Chun Luo Jian-Bin
• 机 构: State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China“,”Key Laboratory for P
• 出 处: 中国物理B（英文版）
• 发表日期: 2007年12期
• 关键词: pulsed laser arc deposition diamond-like carbon tribological property physical p

A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp2, sp3 and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increre with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67-123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17-41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.