论文部分内容阅读
用ＢＥＳＯＩ技术形成带腔结构，研制了具有高过载性能的绝压式和差压式压力传感器。用凸型梁结构使形变膜的应力放大，可提高传感器的输出灵敏度，实验得到的负压传感器的非线性度小于０．１％，５Ｖ时输出灵敏度约２．６ｍＶ／ｋＰａ。
With BESOI technology to form a cavity structure, developed with high overload performance of absolute pressure and differential pressure sensor. The stress of the deformation film is enlarged by the convex beam structure, which can improve the output sensitivity of the sensor. The nonlinearity of the negative pressure sensor is less than 0.1% and the output sensitivity is about 2.6mV / kPa at 5V.