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圆光栅已经普遍用于高精度角度仪器作为定位基准，然而要研制得到超高精度圆光栅，必须要精度高，均匀性好，两者缺一不可［1］，本文研究达到二者全优。
Circular grating has been widely used for high-precision angle instruments as the positioning datum, however, to develop ultra-high precision circular grating, it is necessary to have high precision and good uniformity, both of which are indispensable [1].