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在微机电系统技术的基础上,采用两层多晶硅表面微加工工艺,设计并加工制作了一种闪耀角可调式的微型可编程光栅。介绍了微型可编程光栅的基本工作原理及结构设计特点,针对其最主要的一个光学参量——最大闪耀角,根据设计的光栅结构尺寸进行了理论计算,并利用ANSYS有限元仿真结合Matlab软件的数据处理功能进行了数值模拟。设计并搭建了一个简单易操作的光学实验系统,对最大闪耀角进行了实际测量。结果表明,理论计算、数值模拟以及实际测量的最大闪耀角非常吻合,制作的微型可编程光栅的最大闪耀角超过5°。
Based on the MEMS technology, a two-layer polycrystalline silicon micro-fabrication process is designed and fabricated to produce a programmable blazed grating with blazed angle. In this paper, the basic working principle and structural design features of micro-programmable grating are introduced. According to the grating parameter of the most important optical parameter, the maximum blaze angle, the theoretical calculation is carried out. By using ANSYS finite element method and Matlab software Data processing functions were numerically simulated. A simple and easy-to-operate optical experiment system was designed and constructed to measure the maximum blaze angle. The results show that theoretical calculation, numerical simulation and actual measurement of the maximum blaze angle are in good agreement. The maximum blaze angle of fabricated micro-programmable gratings exceeds 5 °.