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为了得到更好的蚀刻效果,研究蚀刻液的稳定性具有必要性,其实验研究方法显得尤为重要。采用原子发射光谱法得出蚀刻液中Ni2+浓度,间接计算出腐蚀量的数据采集方法,研究了3组不同成分浓度蚀刻液的稳定性,将考察蚀刻速率—腐蚀量的关系与蚀刻速率—时间的关系这2种方法进行了对比实验。实验结果证明:通过蚀刻速率—腐蚀量的关系来考察蚀刻液的稳定性具有可行性和优越性;同时得到,3种蚀刻液中,1B42稳定性最好,且该蚀刻液的最大金属腐蚀量为3g/L。
In order to get a better etching effect, it is necessary to study the stability of etching solution. The experimental research method is very important. Atomic emission spectrometry was used to get the concentration of Ni2 + in the etching solution. The data acquisition method was used to calculate the corrosion amount indirectly. The stability of the etching solution at three different concentrations was studied. The relationship between the etching rate and the etching rate and the etching rate - time The relationship between these two methods were compared experiment. The experimental results show that it is feasible and superior to investigate the stability of etchant through the relationship between etching rate and corrosion amount. In the same time, the stability of 1B42 is the best, and the maximum corrosion rate 3g / L.