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采用预制膜硫化法制备铜锌锡硫(CZTS)薄膜,分别在350,400,450,500,550℃进行硫化,研究了硫化温度对薄膜特性的影响。结果表明:硫化温度低于400℃时硫化反应基本上不发生,主要发生Cu6Sn5和Cu5Zn8两相中元素相互扩散的合金化过程,只有少量硫化物Sn3S4和ZnS生成;硫化温度为450℃时,合金相消失,硫化后的薄膜同时含有CZTS和SnS;硫化温度为500℃时薄膜的主要组成相为CZTS,其晶粒尺寸达2μm,但表面粗糙;硫化温度为550℃薄膜中CZTS晶粒尺寸约为2μm,表面平整。
The films of copper zinc tin sulfur (CZTS) were prepared by the pre-film vulcanization method and vulcanized at 350, 400, 450, 500 and 550 ℃, respectively. The influence of vulcanization temperature on the film properties was also studied. The results show that the vulcanization reaction basically does not occur when the vulcanization temperature is lower than 400 ℃, and the intergranular diffusion of elements Cu6Sn5 and Cu5Zn8 occurs mainly during the alloying process, and only a small amount of sulfide Sn3S4 and ZnS are formed. When the vulcanization temperature is 450 ℃, CZTS and SnS in the film after vulcanization. The main phase of the film is CZTS with the grain size up to 2μm, but the surface roughness is obtained at the vulcanization temperature of 500 ℃. The CZTS grain size in the film is about 550 ℃ 2μm, the surface is smooth.