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该文介绍了采用准分子激光作为激发源,结合光学多道分析仪(OMA)的并行检测及同时谱扩展技术［1］,自编数据采集软件,对中低合金钢样进行采谱并给出150NM同时谱采集结果.“,”Experimental method including XeCl eximer Laser?excited,optical multichannel analyzer(OMA) combined with the simultaneous spectrum widen technique was introduced in this paper.We programed data acquisition software and tested alloy?steel sample.The acquisition result of 150nm simultaneous spectrum was showed.The charaterics and significances of our research were discussed.??