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采用离子注入结合低温离子渗硫法制备了Mo S2/Fe S复合薄膜,并借助扫描电子显微镜、X射线光电子能谱仪和纳米压痕仪对复合薄膜进行了表征。结果表明,复合薄膜呈微球结构,颗粒尺寸均匀,约为500 nm。复合薄膜主要由Mo S2、Fe S及少量的氧化物组成。基体与复合薄膜的硬度分别为6.57 GPa和7.89 GPa,弹性模量分别为223.8 GPa和246.2 GPa。相对基体复合薄膜的硬度及弹性模量分别提高约20%和10%,弹性特征值H/E亦相应提高了约10%,表明其较基体具有更高的磨损抗力。
Mo S2 / Fe S composite thin films were prepared by ion implantation combined with low temperature ion-osmosis method. The composite thin films were characterized by scanning electron microscopy, X-ray photoelectron spectroscopy and nanoindentation. The results showed that the composite film was microspheres structure, uniform particle size, about 500 nm. The composite film is mainly composed of Mo S2, Fe S and a small amount of oxide. The hardness of matrix and composite films were 6.57 GPa and 7.89 GPa, respectively. The elastic modulus was 223.8 GPa and 246.2 GPa, respectively. The hardness and elastic modulus of the composite film increased by about 20% and 10%, respectively, and the elastic characteristic value H / E increased by about 10% correspondingly, indicating that it has a higher wear resistance than the matrix.