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在碱性条件下通过TEOS和MTES的共水解缩聚反应制备了单甲基原位改性的SiO2溶胶,并使用提拉法在K9玻璃基片上镀制了疏水减反膜。通过透射电镜(TEM)考察了镀膜溶胶的微结构,分别使用红外光谱(FTIR)分析了薄膜的组分,用原子力显微镜(AFM)观察了薄膜的表面形貌和起伏状况,用紫外可见光谱(UV-vis)考察了薄膜的减反射性能,用接触角仪测量了薄膜对水的接触角。并使用“R-on-1”的方式测量了薄膜在Nd:YAG激光(1 064 nm,1 ns)作用下的损伤阈值。结果表明,通过共水解缩聚反应可以把甲基引入镀膜溶胶簇团中,改善了溶胶簇团的网络结构,使薄膜得到相当好的疏水性能和更好的抗激光损伤性能,同时薄膜能保持较好的减反射性能。
The monomethyl in situ modified silica sol was prepared by cohydrolysis polycondensation of TEOS and MTES under alkaline conditions. The hydrophobic antireflective film was coated on the K9 glass substrate by using the Czochralski method. The microstructure of the coating sol was investigated by transmission electron microscopy (TEM). The composition of the films was analyzed by Fourier transform infrared spectroscopy (FTIR). The surface morphology and undulation of the films were observed by atomic force microscopy (AFM) UV-vis) were used to investigate the antireflection properties of the films. The contact angles of the films with water were measured by a contact angle meter. The damage threshold of the film under Nd: YAG laser (1 064 nm, 1 ns) was measured by using “R-on-1” method. The results showed that the methyl group can be introduced into the sol-gel clusters by cohydrolysis polycondensation reaction, the network structure of the sol clusters is improved, the hydrophobic properties of the sol-gel films are better and the laser damage resistance is better. Meanwhile, Good anti-reflection performance.