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研究了光子晶体波导对垂直腔面发射激光器(VCSEL)光束远场形貌的调控.采用三层对称平板波导模型分析了影响光子晶体VCSEL(PC-VCSEL)远场发散角的参数.研究表明,PC-VCSEL中光子晶体的填充比(空气孔直径和光子晶体周期的比值)以及空气孔的刻蚀深度控制了光束的发散角,低填充比和浅刻蚀的PC-VCSEL有利于获得低发散角的光束.设计并制作了两种不同结构参数的PC-VCSEL,这两种器件中光子晶体的填充比和空气孔的刻蚀深度不同.实验结果表明,低填充比和浅刻蚀的PC-VCSEL的发散角更低,与理论分析符合得很好.
The effects of photonic crystal waveguides on the far-field topography of a vertical cavity surface-emitting laser (VCSEL) beam were investigated. The parameters affecting the far-field divergence angle of a photonic crystal VCSEL (PC-VCSEL) were analyzed by using a three-layer symmetric slab waveguide model. PC-VCSEL in the photonic crystal filling ratio (air hole diameter and photonic crystal cycle ratio) and the depth of the air hole control the beam divergence angle, low fill ratio and shallow etching PC-VCSEL help to achieve low divergence Angle beam.The PC-VCSEL was designed and fabricated with two different structural parameters, and the filling ratio of photonic crystals in these two devices was different from that of the air hole.The experimental results show that the PC-VCSEL with low filling ratio and shallow etching PC The divergence angle of -VCSEL is lower, which is in good agreement with the theoretical analysis.