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用于传感器和光电子学的微机电系统谢菲尔德大学从事微机电系统研究的科研人员已经成功地开发出了一些引人注目的器件以及同样引人注目的制作技术。微机电系统的成功包括设计和制作导航用传感器即陀螺和磁力仪。陀螺基于一个转动的微型电感电机，其内部有一个比较高角速度...
MEMS for Sensors and Optoelectronics Researchers at the University of Sheffield who work on microelectromechanical systems have successfully developed compelling devices and equally impressive fabrication techniques. The success of MEMS includes the design and fabrication of navigation sensors, gyros and magnetometers. The gyro is based on a rotating miniature inductive motor with a relatively high angular velocity inside ...