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系统地研究了二氧化硅薄膜驻极体的负表面电荷和正表面与体电荷受激脱阱后在体内的输运规律。并考察了这种驻极体的放电特性，化学表面处理对该驻极体的电荷稳定性及电荷层在体内的迁移规律的影响。充电后的适当老化程序，可使电荷重心从样品的自由面附近向体内迁移，由此导致的二氧化硅的体内负电荷具有极好的稳定性。这一结果对正在研制中的二氧化硅微型传感器的质量改善是十分重要的。
The negative charge of surface of silica film electret and the law of transport in the body after the positive charge and de-trap charge of the surface were systematically investigated. The discharge characteristics of the electrets and the effects of chemical surface treatment on the charge stability of the electrets and the migration of the charge layers in the body were investigated. The appropriate aging procedure after charging allows the center of charge to migrate from near the free surface of the sample to the body, resulting in an excellent stability of the negative charge of the silicon dioxide in vivo. This result is very important for the quality improvement of the silicon dioxide sensor under development.