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本文介绍一个数值孔径0.4、视场10×10mm~2可用于1:1分步投影光刻机的镜头的光学设计及其模型实验结果.光学设计在Wynne-Dyson的1:1折反式系统的基础上,对该系统作了某些改变.实验结果表明,该镜头具有亚微米的光刻分辨率.
In this paper, the optical design of a lens with a numerical aperture of 0.4 and a field of view of 10 × 10-2 can be applied to a 1: 1 step-and-repeat projection lithography machine. The optical design is based on the Wynne-Dyson 1: Based on the system made some changes in the experimental results show that the lens has a sub-micron lithography resolution.