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声空化所引发的特殊的物理、化学环境为制备高效发光的多孔硅薄膜提供了一条重要的途径 .实验结果表明 ,声化学处理对于改善多孔硅的微结构 ,提高发光效率和发光稳定性都是一项非常有效的技术 .超声波加强阳极电化学腐蚀制备发光多孔硅薄膜 ,比目前通用的常规方法制备的样品显示出更优良的性质 .这种超声的化学效应源于声空化 ,即腐蚀液中气泡的形成、生长和急剧崩溃 ,在多孔硅的腐蚀过程中 ,孔中的氢气泡 ,由于超声波的作用增加了逸出比率和塌缩 ,有利于孔沿垂直方向的腐蚀 .
The special physical and chemical environment caused by acoustic cavitation provides an important way to prepare highly efficient luminescent porous silicon films.The experimental results show that the sonochemical treatment can improve the microstructure of porous silicon and improve the luminous efficiency and luminous stability Is a very effective technique.Electronic enhanced anodic electrochemical etching to prepare luminescent porous silicon thin films shows more excellent properties than the samples prepared by the conventional methods which are commonly used at present.The chemical effect of this ultrasonic wave comes from the cavitation, The formation, growth and sharp collapse of bubbles in the liquid during the etching process of the porous silicon increase the escape ratio and the collapse of the hydrogen bubbles in the pores due to the action of the ultrasonic waves, which is favorable for the corrosion of the pores in the vertical direction.