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本文首先介绍了原子力显微术的基本理论，其次讨论了原子力显微镜的结构原理，主要报导了一台我们研制的使用光学偏转法检测的原子力显微镜及仪器性能，仪器测试的结果表明我们这台原子力显微镜获得到了原子分辨率，最后给出使用这台显微镜的首批实验结果。
This paper firstly introduces the basic theory of atomic force microscopy and secondly discusses the structural principle of atomic force microscope. It mainly reports an atomic force microscope and instrument performance that we have developed using optical deflection method. The results of the instrument test show that our atomic force The atomic resolution was obtained with the microscope and the first experimental results were obtained using this microscope.