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为提高压电测力传感器的检测精度,减小横向干扰,应用坐标变换矩阵对压电石英晶片灵敏度分布规律进行了理论研究,给出了在新坐标系中的压电系数矩阵d’=adα-1通用公式,并解出 Y0°,AT,BT等切型的压电系数矩阵和Y0°切型切向灵敏度分布规律。同时介绍了最新研制的应用微机控制的灵敏度分布规律连续跟踪检测系统,并用其对Y0°切型晶片切向灵敏度分布情况进行了检测,结果表明理论分析与实测结果完全吻合。
In order to improve the detection precision of piezoelectric load cell and reduce the lateral interference, the coordinate distribution matrix is used to study the sensitivity distribution of piezoelectric quartz wafer. The piezoelectricity matrix d ’= adα -1 general formula, and solved for the Y0 °, AT, BT and other piezoelectric shear coefficient matrix type and Y0 ° tangential direction tangential sensitivity distribution. At the same time, we introduce the newly developed continuous tracking detection system using the microcomputer-controlled sensitivity distribution, and use it to test the tangential sensitivity distribution of the Y0 ° -cut wafer. The results show that the theoretical analysis is in good agreement with the measured results.