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对小角Ｘ射线衍射法测出的Ｃｏ／Ｓｉ多层膜的平均折射率修正值为负的原因作了进一步的分析，提出了修正的具有化合物层的多层膜结构模型，运用光学多层膜理论计算小角衍射强度时代入了负的折射率修正值δ，得到的理论计算曲线与实验曲线趋于一致．
The reason why the average refractive index correction value of the Co / Si multilayer film measured by the small-angle X-ray diffraction method is negative is further analyzed. A modified multilayer film structure model with a compound layer is proposed. By using the optical multilayer film Theoretical calculation of small-angle diffraction intensity into a negative refractive index correction δ, the theoretical curve obtained and the experimental curve tend to be consistent.