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在各种实验条件下,总共对83块ST切单晶石英圓片的抗拉断强度进行了测量。这项研究的重点是,比较包括天然级和三个人造级(光学级,优质Q级和电子级)的四种不同类型石英的抗拉断强度。由于断裂强度通常与表面光洁度有关,因此,还对两种不同的抛光技术进行了评价。一种技术是从粗磨的表面开始采用Syton抛光。第二种技术是短暂的Syton抛光之后,随即进行精密机械抛光。采用双轴扭曲试验法测量了直径为1英寸,标称厚度为0.1英寸的石英片的抗拉断强度。经拋光的试样平均断裂强度为21,400磅/英寸~2,其标准偏差为±6.000磅/英寸~2。对于四种类型石英和两种不同的拋光技术来说,断裂强度的差别很小。两种类型的平均断裂强度之间的差别正好在标准偏差之内。我们对5块未经抛光的石英片也作了实验,发现其平均断裂强度为8900±800磅/英寸~2。很清楚,抛光的表面会使断裂强度提高两倍多。为了改变石英片表面的性质,还研究了两种特殊的技术。据报道,对很薄的石英片进行了化学腐蚀,就能够有效地提高断裂强度。为了试验化学腐蚀对薄石英片的影响,还折断了经化学腐蚀的10块试样。但是,许多经腐蚀的试样出现了很多腐蚀坑或腐蚀沟,它们的平均断裂强度明显低于抛光的石英片。有些试样少有或没有腐蚀坑或腐蚀沟,它们的断裂强度与抛光过的试样不相上下。另外7个试样在离子刻蚀的抛光表面上有1600个浅槽(～1000A深)。这些试样在平均断裂强度方面没有大的变化。除上述参数外,还发现其他因素,诸如相对温度、Q值(根据红外测量)和试样厚度与断裂强度无关。
In a variety of experimental conditions, a total of 83 ST-cut single crystal quartz wafer tensile strength was measured. The focus of this study was to compare the tensile strength at break of four different types of quartz, including natural and three artificial grades (optical grade, high quality Q grade and electronic grade). Since the breaking strength is usually related to the surface finish, two different polishing techniques were also evaluated. One technique is to use Syton polishing starting from a coarsely ground surface. The second technique is a brief Syton polishing followed by a precision mechanical polishing. Tensile strength at break of a quartz plate having a diameter of 1 inch and a nominal thickness of 0.1 inch was measured by a biaxial twisting test. Polished specimens had an average breaking strength of 21,400 lbs / in2 and a standard deviation of ± 6.000 lbs / in2. For four types of quartz and two different polishing techniques, the difference in breaking strength is small. The difference between the two types of average breaking strength is within standard deviation. We also tested five pieces of unpolished quartz and found that the average breaking strength was 8900 ± 800 psi. Clearly, the polished surface will increase the breaking strength more than twice. In order to change the nature of the quartz plate surface, two special techniques have also been investigated. It has been reported that chemical etching of very thin quartz pieces can effectively increase the breaking strength. In order to test the effect of chemical etching on thin quartz films, ten chemically etched samples were also broken. However, many etched samples show a lot of corrosion pits or corrosion grooves, and their average breaking strength is significantly lower than that of polished quartz sheets. There are few or no corrosion pits or corrosion grooves in some specimens, which have fracture strengths comparable to polished specimens. The other seven samples had 1600 shallow grooves (~ 1000 A deep) on the ion-etched polished surface. These samples showed no major change in average breaking strength. In addition to the above parameters, other factors such as relative temperature, Q (based on infrared measurements) and sample thickness are not related to breaking strength.