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利用荧光光谱研究了聚苯乙烯砜正性远紫外抗蚀剂薄膜和溶液的光氧化反应。发现聚苯乙烯砜的荧光随光照时间的延长而逐步减少。这一现象和在未辐照的聚苯乙烯砜中加入微量的芳香氢过氧化物或羰基化合物时的情况相同。这表明:聚苯乙烯砜经光照后荧光的淬灭和体系光氧化过程中产生了氢过氧化物或羰基化合物有关。这一方法适宜于对高聚物光氧化初始阶段的研究。
The photooxidation of polystyrene sulfone positive far UV resist films and solutions was studied by fluorescence spectroscopy. It was found that the fluorescence of polystyrene sulfone decreased gradually with the illumination time. This phenomenon is the same as that when a small amount of aromatic hydroperoxide or carbonyl compound is added to the non-irradiated polystyrene sulfone. This indicates that the fluorescence quenching of polystyrene sulfone is related to the production of hydroperoxides or carbonyl compounds during photooxidation of the system. This method is suitable for the initial stage of photo-oxidation of polymers.