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介绍了反射电子显微术的成像原理和实现这种技术的方法,报道了用JEM-200CX电镜对Pt(111)小面微结构观察的结果。利用反射电子束成像可以揭示平坦小面的微观结构,如单原子高度的台阶,位错露头和滑移迹线等;利用背散射电子成像,可以揭示Pt(111)小面微结构的转变。实验结果表明,反射电子显微术是分析表面微结构的有效方法。
The imaging principle of reflection electron microscopy and the method of realizing this technique are introduced. The results of observing Pt (111) facet microstructure with JEM-200CX electron microscope are reported. Reflecting electron beam imaging can reveal the microstructure of flat facets, such as single-atom height steps, dislocation outcrops and slip traces. The backscattering electron imaging can reveal the transformation of Pt (111) facet microstructure. Experimental results show that reflected electron microscopy is an effective method to analyze the surface microstructure.