论文部分内容阅读
波前功率谱密度(PSD)被用于评价惯性约束聚变(ICF)激光驱动器光学元件中频段的波前误差。干涉仪对PSD较高空间频率分量的测量存在失真效应,可通过干涉仪系统传递函数(STF)的检测标定来获得真实的波前PSD分布。采用台阶板位相比较法测得大口径菲索相移干涉仪检测系统在透射和反射检测情形下的传递函数。对传递函数测试算法进行了比较分析,明确了干涉仪系统zoom倍率的改变等因素对传递函数测量的影响,为波前PSD的准确检测奠定了基础。
The wavefront power spectral density (PSD) was used to evaluate the wavefront error in the mid-band of an inertial confinement fusion (ICF) laser driver optics. The interferometer has a distortion effect on the measurement of higher spatial frequency components of the PSD, and the true wavefront PSD distribution can be obtained through the detection calibration of the interferometer system transfer function (STF). The Transfer Function of Large-diameter Fischer-Tropsch Phase Shift Interferometer Detection System Under Transmission and Reflectance Detection Using Stepped Plates. The transfer function test algorithm is comparatively analyzed, the influence of factors such as the change of zoom ratio of the interferometer system on the transfer function measurement is clarified, which lays the foundation for the accurate detection of the wavefront PSD.