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文中介绍了用真空溅射方法在工件表面上沉积碳化钛的设备和工艺,讨论了影响工艺的因素,并提出了存在的问题。这项工艺曾试用于模具和刀具上,显著地提高了使用寿命。
In this paper, the equipment and process of depositing titanium carbide on the surface of workpiece by vacuum sputtering are introduced. The factors that affect the process are discussed and the existing problems are raised. The process has been tried on molds and tools, significantly improving the service life.