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本文介绍了无油自支撑金属薄膜的制备方法、装置和因油蒸气污染靶膜所造成的对于核物理实验数据准确性的影响。三种元素无油膜的制备及对膜中碳含量的分析表明:本装置对消除油的沾污效果明显。
This article describes the preparation of oil-free self-supporting metal film, the device and the oil vapor contamination of the target film caused by the nuclear physics experimental data accuracy. The preparation of three elements without oil film and the analysis of carbon content in the film show that the device has obvious effect of eliminating oil stain.